PLASTIC CYLINDER
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| 用于各种硅片所用石英舟（承载晶片）的取
用、移位，承载部分采用进口PTFE材料加 工，316不锈钢和TEFLON®涂层 |
用于化学品，特别是瓶装化学液的平稳、推
动式运输，适合在有高洁净度要求的室内使 用。 |
保证硅片在转移过程中不被污染，从而减少
不必要的损失。 |
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The boat handle is used to carry quartz cassettes. The carrier is made of imported PTFE, 316 stainless steel with TEFLON® coated. |
Used to deliver chemical bottles in the cl ean room. |
Protecting the wafers from particles during its transferring process. |
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用于清洗设备工作时，工件的进/出，机盖的 锁定，提高设备的抗腐蚀及安全性。 |
光胶及化学过滤芯外壳。 |
用于各种高洁净度化学液储存箱中液位控制 及报警。 |
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Used for wet process parts automation, lid lock, enhance system chemical resistance and safety. |
PTFE filter housing. |
Used for ultra-pure chemical reservoir liquid level sensing and control. |
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| 本产品主要用于半导体及相关精密电子原件的放置和储存，具有防尘，防氧化，干燥保护等作用。
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| Used to store semiconductor related precious parts, preventing particles, oxidation and humidity. |
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本产品主要用于湿法处理过程中化学液的加热。相对于传统加热器而言,它的能量效率要大于98.9%,使用寿命是其他形式加热器的2倍。
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Used for wet process chemicals heat up, energy efficiency >98.9%,
life time >2 times (compare to traditional heaters). |
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| 清洗及吹扫设备或零件上残留的化学液。 |
对氮气/压缩空气进行在线加热。 |
用于排液体管路分配，实现管路系统自动控制。 |
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Used to spray and clean the chemicals left on the equipment or its parts |
inline N2/
cda Heater is made of electric polished Stainless Steel, designed to heat up process gases. |
Used to distribute waste chemicals drain. |
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SUBSTRATE CASSETTES HANDLES
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湿处理过程中稀释和冷却化学液。 |
频率 (Frequency) ： 25KHz/40 KHz /70 KHz /120 KHz /160KHz 频率范围(Frequency Range): 1.0MHz-1.2MHz |
用于化学工艺中支撑基片花篮。 |
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It is ideal for cooling and diluting chemical solutions during wet process. |
单位功率 (Unit Power)：20W-50W/Tran |
Used for handle substrate cassettes during wet process. |
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电子冷热器用于工艺化学液闭路控温循环系统，应用珀耳帖效应，加热或冷却特定的化学液，使化学液的温度满足基片湿处理工艺精度要求。
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The semiconductor heat exchanger is a closed-loop
system, used for controlling process temperature of substrates wet
process requirement. It uses Peltier effect to heat up or cool down
specified chemicals to meet their wet process accuracy |
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